AC Electrothermal Characterization of Doped-Si Heated Microcantilevers Using Frequency-Domain Finite Element Analysis - new
K. Park, S. Hamian, A. M. Gauffreau, T. Walsh
Mechanical Engineering Department, University of Utah, Salt Lake City, UT, USA
Department of Mechanical, Industrial & Systems Engineering, University of Rhode Island, Kingston, RI, USA
This work investigates the frequency-dependent electrothermal behaviors of freestanding doped-silicon heated microcantilever probes operating under the periodic (ac) Joule heating. The transient heat conduction equation for each component (i.e., the low-doped heater region, the high-doped constriction region, and the high-doped leg region) is solved using the general heat transfer module for DC ...
A. G. S. Barreto Neto , A. M. N. Lima , C. S. Moreira ,
 Instituto Federal de Ciência e Tecnologia - IFPB, João Pessoa, PB, Brasil
 Universidade Federal de Campina Grande - UFCG, Campina Grande, PB, Brasil
Este trabalho trata do dimensionamento da estrutura bocal/difusor utilizando a simulação computacional com fronteira móvel. Esse tipo de simulação contempla toda estrutura da bomba, isto é, câmara de bombeamento, difusor e área de dispersão de fluxo, de modo a contabilizar o refluxo em função da estrutura, possibilitando um projeto mais realísticos da estrutura.
H. T. D. Grigg, and B. J. Gallacher
Newcastle upon Tyne
Tyne and Wear, UK
This paper presents ongoing research aimed at development of a MEMS magnetometer capable of nanoTesla sensitivity. Such a device would pave the way for inertial-grade MEMS IMUs. A resonant sensor is proposed, based on a Xylophone Bar sense element, and is analysed both directly and via COMSOL. Mode shapes and frequencies are found as functions of geometric parameters, and the results used ...
L. Sujatha, D. K. Balasubramanian, V. S. Selvakumar
Rajalakshmi Engineering College, Chennai, India
University of Central Florida, Orlando, Florida, United States
Micro Mirror is a versatile device which has been gaining popularity and also the importance of MEMS techniques to develop such devices. These mirrors find applications in fields such as optical switching, display and in medical fields for non-invasive imaging. A thermally actuated mirror moves in either vertical or horizontal directions for the given orientation. The ends of thermal actuators ...
J. Yoo, H. Soh, J. Choi, S. Song
Department of Mechanical Engineering, Yonsei University, Korea
Hyundai Motor Co., Korea
Samsung Electronics Co., Ltd., Korea
Mando Co., Korea
Nanoscale structural analysis and design is presented. All the simulations are carried out using a finite element solver and optimization is performed using parameter and topology optimization schemes. It is concluded that COMSOL is effective for analysis and design of nanoscale structure design in electromagnetic field and it may be combined with several optimization methods to improve system ...
G. Zhang, S. Bearden
Clemson University, Clemson, SC, USA
It is necessary to understand and control nanopore behavior in order to develop biosensors for a variety of applications including DNA sequencing. The fluidics of nanopore devices we fabricated exhibits a range of interesting phenomena, such as enhanced conductance and current rectification. By electrically biasing nanopores, we were able to actively control the nanopore conductance in real time ...
M. J. Hancock, N. H. Elabbasi, M. C. Demirel
Veryst Engineering, LLC., Needham, MA, USA
Pennsylvania State University, University Park, PA, USA
Pumping liquids at small scales is challenging because of the principle of reversibility: in a viscous regime, the flow streamlines through a fixed geometry are the same regardless of flow direction. Recently we developed a class of microfluidic pump designs based on tilted flexible structures that combines the concepts of cilia (flexible elastic elements) and rectifiers (e.g., Tesla pump). We ...
V. Nivethitha, S. P. Rakavi, K. C. Devi
PSG College Of Technology, Coimbatore, Tamil Nadu, India
In this work, a piezoelectric tactile sensor will be designed and simulated using COMSOL Multiphysics®. The sensor is designed in order to assess the pressure exerted on the human body while the robotic surgery is performed. The sensor consists of a rigid and compliant cylindrical element. A circular PDMS (Polydimethylsiloxane) film is sandwiched between the rigid cylinder and the base plate to ...
S. Suganthi, M. Anandraj, and L. Sujatha
Department of Electronics & Communication Engineering, Rajalakshmi Engineering College, Chennai, India
Department of Physics, Rajalakshmi Engineering College, Chennai, India
Porous Silicon (PS) can easily be formed by electrochemical etching of silicon in HF based electrolytes at room temperature. Since, PS is compatible with silicon IC technology; it finds lot of applications in the fabrication of MEMS devices. In the current study, we discuss the design of a condenser microphone using a Silicon/ Porous Silicon composite membrane as a movable plate. The performance ...
D. Krizaj, I. Iskra, Z. Topcagic, and M. Remskar
University of Ljubljana, Faculty of Electrical Engineering, Ljubljana, Slovenia
Institut Jozef Stefan, Ljubljana, Slovenia
We are developing nanoparticle detector for airborn particles. The detection principle is based on condensation of nanoparticles forming micron sized water droplets and detection of the droplets by a capacitive type nanodetector. We have successfully performed some experimental evaluations of the detection principle and are in the stage of optimization of several parts of the system. As ...