Lam Research on Simulation of Wafer Fabrication and Moore’s Law

Bernt Nilsson | August 5, 2013
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We have come to take for granted the ever-increasing performance gains in computational power. Enabled by advances in semiconductor processing techniques, we reap the benefits from exciting new features in everything from smartphones to workstations. The good news for all of us is that the semiconductor industry is steaming ahead, relentlessly pushing the limits of wafer fabrication. Each year, a new generation of sophisticated fabrication equipment is developed. Features etched on silicon are now at the atomic scale. In the quest for smaller-sized circuit features on silicon, the leading provider of wafer fabrication equipment and services, Lam Research Corporation, is leveraging multiphysics simulation. In fact, there is an interesting relationship between development of fabrication equipment to increase integrated circuit transistor density and computer modeling.

Semiconductor Fabrication and Computer Modeling, a Symbiotic Relationship

Dr. Peter Woytowitz, Senior Manager of Computational Modeling & Reliability at Lam Research, will hold a keynote talk at the COMSOL Conference 2013 Boston on October 9-11. There, he will share his view on the symbiotic relationship between Moore’s Law, which states the number of transistors on an integrated circuit doubles every 18 months, and computational modeling. Computational modeling helps us to better understand and optimize semiconductor fabrication process stages, like etching, deposition, and cleaning. The resulting advances in semiconductor manufacturing process technology contribute to enabling Moore’s Law and thereby, in turn, boost computational power.

Multiphysics Modeling of Wafer Fabrication Processes

Lam Research was one of the early adopters of COMSOL Multiphysics. They started modeling electromagnetic field simulation and then branched out to other applications. The simulation work to be showcased at the conference is of a truly multiphysics nature, and includes mechanical, fluid, and electrical effects. In addition, Pete will talk briefly about his future work, which will include molecular dynamics and quantum chemistry modeling. His keynote on “The Symbiotic Relationship between Moore’s Law and Computational Modeling” will be held during the general session in the Grand Ballroom on October 10th.

About the Keynote Speaker

Dr. Pete Woytowitz is the Senior Manager of Computational Modeling & Reliability at Lam Research Corporation (Fremont, CA). He focuses on the modeling and optimization of complex systems at the feature scale level. Simulation of these systems include stress, thermal, dynamics, and reliability studies. Before working at Lam, Pete was a Principal Engineer at Engineering Mechanics Technology and has held positions at Failure Analysis Associates, Loral Space Systems, and Boeing Commercial Airplane Company. Pete earned his PhD in Mechanical Engineering and is an adjunct professor at Santa Clara University as well as a California registered professional engineer. He has degrees from the University of Maryland and Stanford University. Three U.S. patents have been awarded to Pete and he has published over thirty papers.

Dr. Pete Woytowitz Lam Research Corporation
Dr. Pete Woytowitz,
Sr. Manager of Computational
Modeling & Reliability,
Lam Research Corporation.

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