CVD Graphene Growth Mechanism on Nickel Thin Films

K. Al-Shurman[1], H. Naseem[2]
[1]The Institute for Nanoscience & Engineering, University of Arkansas, Fayetteville, AR, USA
[2]Department of Electrical Engineering, University of Arkansas, Fayetteville, AR, USA

Chemical vapor deposition is considered a promising method for synthesis of graphene films on different types of substrate utilizing transition metals such as Ni. However, synthesizing a single-layer graphene and controlling the quality of the graphene CVD film on Ni are very challenging due to the multiplicity of the CVD growth conditions. COMSOL Multiphysics® software is used to investigate the graphene CVD growth on Ni film and determine the main factors affecting graphene CVD synthesis. Our COMSOL model uses transport of diluted species, heat transfer in Ni thin film as well as deformed geometry. In this particular research, the number of the simulated graphene layers on Ni film is compared with experimental data.