Application Gallery

The Application Gallery features COMSOL Multiphysics tutorial and demo app files pertinent to the electrical, mechanical, fluid, and chemical disciplines. You can download ready-to-use tutorial models and demo apps with step-by-step instructions for how to create them yourself. The examples in the gallery serve as a great starting point for your own simulation work.
Use the Quick Search to find tutorials and apps relevant to your area of expertise. Log in or create a COMSOL Access account that is associated with a valid COMSOL license to download the MPH-files.

Squeezed-Film Gas Damping in an Accelerometer

Squeezed-film gas damping is a critical aspect of many MEMS transducers and actuators. In accelerometers, for example, inertia produces a motion that the device detects. A typical structure connects a large proof mass to surrounding structures with elastic beams, which forms a mechanical oscillator with a specific resonance frequency. However, in accurate motion-detection applications these ...

Pull-in Voltage for a Biased Resonator-2D

Silicon micromechanical resonators have long been used for designing sensors and are now becoming increasingly important as oscillators in the consumer electronics market. In this series of models, a surface micromachined MEMS resonator, designed as part of a micromechanical filter, is analyzed in detail. The Stationary Analysis of a Biased Resonator model performs a stationary analysis of ...

Surface Micromachined Accelerometer

This model shows how to simulate a capacitively actuated surface micromachined accelerometer, using the Electromechanics Interface. It is based on a case study from the book Microsystem Design by Stephen D. Senturia (Kluwer Academic Publishers, 5th Edition, 2003, pages 513-525).

Thin-Film BAW Composite Resonator

Bulk Acoustic Wave (BAW) resonators can be used as narrow band filters in radio-frequency applications. The chief advantage compared with traditional ceramic electromagnetic resonators is that BAW resonators, thanks to the acoustic wavelength being much smaller than the electromagnetic wavelength, can be made much smaller. In addition to the desired bulk acoustic mode, the resonator structure ...

Thermal Actuator

This tutorial model of a two-hot-arm thermal actuator couples three different physics phenomena: electric current conduction, heat conduction with heat generation, and structural stresses and strains due to thermal expansion. In this model version, the geometry is parameterized so that the effect of varying the actuator's dimensions can be analyzed.

Residual Stress in a Thin Film Resonator - 3D

Surface micromachined thin films are often subject to residual stress. This COMSOL Multiphysics example describes a thin film resonator with straight or folded cantilever beam springs. The resonance frequencies of the resonator are affected by thermal stress. Using folded springs relieves this effect. The example is made up of four models: two thin film resonators with folded cantilever beam ...

Thermoelastic Damping in a MEMS Resonator

Thermoelastic damping, which arises when you subject a material to cyclic stress, is an important factor when designing MEMS resonators. The stress brings about deformation, where materials heat under compressive stress and cool under tensile stress. Thus, due to the resulting heat flux, energy is lost to bring about this damping. The magnitude of the energy loss depends on the vibrational ...

Thermal Initial Stresses in a Layered Plate

The thermal stress in a layered plate is studied in this example. A plate consisting of two layers, a coating and a substrate layer is stress and strain free at 800 degrees C. The temperature of the plate is reduced to 150 degrees C and thermal stresses are induced. A third layer, the carrier layer, is added and the thermal stresses in the coating and a substrate layer are added as an initial ...

Thickness Shear Mode Quartz Oscillator

AT cut quartz crystals are widely employed in a range of applications, from oscillators to microbalances. One of the important properties of the AT cut is that the resonant frequency of the crystal is temperature independent to first order. This is desirable in both mass sensing and timing applications. AT cut crystals vibrate in the thickness shear modeā€”an applied voltage across the faces of ...

Prestressed Micromirror

One method of creating spring-like structures or inducing curvature in thin structures is to plate them to substrates that are under the influence of residual stresses. The plating process can control this stress even for similar materials. One such device is the electrostatically controlled micromirror. It is typically quite small, and arrays of such devices can be implemented in projectors. ...

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