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TM Mode Microwave Plasma

Application ID: 16683


This model shows how to simulate a TM mode microwave plasma by using the Doppler broadening parameter to smooth out the resonance zone, which occurs on the contour of critical electron density.

A detailed explanation of the underlying physics of this model can be found in the blog entry "Application Note on Microwave Discharges".

This application was built using the following:

RF Module

The combination of COMSOL® products required to model your application depends on the physics interfaces that define it. Particular physics interfaces may be common to several products (see the Specification Chart for more details). To determine the right combination of products for your project, you should evaluate all of your needs in light of each product\'s capabilities, consultation with the COMSOL Sales and Support teams, and the use of an evaluation license.