TM Mode Microwave Plasma

Application ID: 16683

This model shows how to simulate a TM mode microwave plasma by using the Doppler broadening parameter to smooth out the resonance zone, which occurs on the contour of critical electron density.

A detailed explanation of the underlying physics of this model can be found in the blog entry "Application Note on Microwave Discharges".

This model is included as an example in the following products:

RF Module