In-Plane Microwave Plasma

Application ID: 8664


Wave heated discharges may be very simple, where a plane wave is guided into a reactor using a waveguide, or very complicated as in the case with ECR (electron cyclotron resonance) reactors. In this example, a wave is launched into reactor and an Argon plasma is created. The wave is partially absorbed and reflected by the plasma which sustains the plasma.

This model example illustrates applications of this type that would nominally be built using the following products:

Plasma Module