Login

COMSOL Multiphysics®

> Plasma Module

Plasma Module

Browse by:

Application Area

Product

Multiphysics Applications

User Stories

Finding the One Solution for Multiscale Multiphysics Modeling in Wafer Processing

TEL Technology Center, Albany, NY
Semiconductor wafer manufacturing involves a number of processes, ranging in size from nanometers to meters. This, along with coupling the physics of chemical...

Example Models

	Dielectric Barrier Discharge This model simulates electrical breakdown in an atmospheric pressure gas. Modeling dielectric barrier discharges in more than one dimension is possible, but the results can be difficult to interpret because of the amount of competing...
	GEC ICP Reactor, Argon Chemistry The GEC cell was introduced by NIST in order to provide a standardized platform for experimental and modeling studies of discharges in different laboratories. The plasma is sustained via inductive heating. The Reference Cell operates as...
	Thermal Plasma This model simulates a plasma at medium pressure (2 torr) where the plasma is still not in local thermodynamic equilibrium. At low pressures the two temperatures are decoupled but as the pressure increases the temperatures tend towards...
	In-Plane Microwave Plasma Wave heated discharges may be very simple, where a plane wave is guided into a reactor using a waveguide, or very complicated as in the case with ECR (electron cyclotron resonance) reactors. In this example, a wave is launched into...
	Electrodeless Lamp This model simulates an electrodeless lamp with argon/mercury chemistry. The low excitation threshold for mercury atoms means that even though the mercury is present in small concentrations, its behavior dominates. There is strong UV...
	Plasma Enhanced Chemical Vapor Deposition (PECVD) This model simulates deposition of silicon onto a wafer using a 95/5 mixture of argon and silane. The plasma chemistry consists of 19 volumetric reactions, 8 surface reactions, 11 volumetric species and 3 surface species. The plasma is...
	Electronegative inductively coupled plasma Electronegative plasmas exhibit different characteristics than electropositive discharges due to the presence of negative ions. This model simulates an inductively coupled plasma for a mixture of Argon (30%) and Oxygen (70%). The plasma...
	Plasma Display Panel This model illustrates the physics of a dielectric barrier discharge which leads to generation of UV light. Such a discharge is used to generate the back light for plasma display panels.